About: Deposition of protective coatings in rf organosilicon discharges

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper discusses the deposition of protective coatings ranging from organosilicon plasma polymers to SiO2-like films and hard diamond-like carbon/silicon oxide (DLC : SiOx) coatings in radio frequency capacitively coupled discharges using hexamethyldisiloxane (HMDSO). As a result of the optimization of the deposition conditions it was possible to obtain high performance protective coatings. In the HMDSO/O-2 mixture, it was shown that rather than the SiO2-like film a hard cross-linked SiOx C-y H-z polymer film can be used as a protective coating for polycarbonate. The optimum conditions for the deposition of an almost stress-free film were 17% of HMDSO and dc bias voltage of -240V. The film hardness and elastic modulus were 10GPa and 75GPa, respectively. The refractive index at 600 nm was 1.5 and the extinction coefficient decreased from 0.02 at 240 nm down to zero at 600 nm. The paper discusses the deposition of protective coatings ranging from organosilicon plasma polymers to SiO2-like films and hard diamond-like carbon/silicon oxide (DLC : SiOx) coatings in radio frequency capacitively coupled discharges using hexamethyldisiloxane (HMDSO). As a result of the optimization of the deposition conditions it was possible to obtain high performance protective coatings. In the HMDSO/O-2 mixture, it was shown that rather than the SiO2-like film a hard cross-linked SiOx C-y H-z polymer film can be used as a protective coating for polycarbonate. The optimum conditions for the deposition of an almost stress-free film were 17% of HMDSO and dc bias voltage of -240V. The film hardness and elastic modulus were 10GPa and 75GPa, respectively. The refractive index at 600 nm was 1.5 and the extinction coefficient decreased from 0.02 at 240 nm down to zero at 600 nm. (en)
Title	Deposition of protective coatings in rf organosilicon discharges Deposition of protective coatings in rf organosilicon discharges (en)
skos:prefLabel	Deposition of protective coatings in rf organosilicon discharges Deposition of protective coatings in rf organosilicon discharges (en)
skos:notation	RIV/00216224:14310/07:00022271!RIV11-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1K05025), P(LC06041), Z(AV0Z10480505), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Peřina, Vratislav Zajíčková, Lenka Buršíková, Vilma Dvořák, Pavel Franta, Daniel Šmíd, Radek Kučerová, Zuzana
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	416245
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/07:00022271
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	CARBON-FILMS; GLOW-DISCHARGES; PLASMA; PECVD; POLYCARBONATE; SUBSTRATE (en)
http://linked.open.../riv/klicoveSlovo	SUBSTRATE PECVD PLASMA CARBON-FILMS GLOW-DISCHARGES POLYCARBONATE
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[068DF8216DBD]
http://linked.open...i/riv/nazevZdroje	Plasma Sources Science and Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Synthesis of new Si-O(N)-C materials by plasma enhanced CVD Preparation, modification and characterization of materials by energetic radiation.
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	16
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Dvořák, Pavel Franta, Daniel Macková, Anna Zajíčková, Lenka Peřina, Vratislav Šmíd, Radek Studýnková, Zuzana
http://linked.open...ain/vavai/riv/wos	000244370700016
http://linked.open...n/vavai/riv/zamer	Jaderná fyzika a příbuzné obory v základním, aplikovaném a interdisciplinárním výzkumu Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0963-0252
number of pages	10 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Deposition of protective coatings in rf organosilicon discharges Deposition of protective coatings in rf organosilicon discharges

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