About: Study of thickness reduction of a-C:H thin film under UV light irradiation

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Description	In this paper we present a study of thickness reduction of an amorphous hydrocarbon (a-C:H) thin film under UV light irradiation. Optical parameters of the film are examined by means of spectroscopic ellipsometry and area reflectance measurement. We observed a linear dependence in thickness reduction. The reduction velocity is 10.1 nm/h in this region. However, if the thickness of the film was less then approx. 14 nm, the reduction velocity decreases subsequently. Area reflectance measurement consisting in taking reflectance spectra in many points lying along the area of the sample is used to create a map with thickness distribution along this area. This method is very sensitive to small thickness variations. In this paper we present a study of thickness reduction of an amorphous hydrocarbon (a-C:H) thin film under UV light irradiation. Optical parameters of the film are examined by means of spectroscopic ellipsometry and area reflectance measurement. We observed a linear dependence in thickness reduction. The reduction velocity is 10.1 nm/h in this region. However, if the thickness of the film was less then approx. 14 nm, the reduction velocity decreases subsequently. Area reflectance measurement consisting in taking reflectance spectra in many points lying along the area of the sample is used to create a map with thickness distribution along this area. This method is very sensitive to small thickness variations. (en)
Title	Study of thickness reduction of a-C:H thin film under UV light irradiation Study of thickness reduction of a-C:H thin film under UV light irradiation (en)
skos:prefLabel	Study of thickness reduction of a-C:H thin film under UV light irradiation Study of thickness reduction of a-C:H thin film under UV light irradiation (en)
skos:notation	RIV/00216224:14310/07:00019457!RIV10-AV0-14310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(KAN311610701)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Valtr, Miroslav Klapetek, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	453335
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/07:00019457
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Carbon; Oxidation; Optical Properties (en)
http://linked.open.../riv/klicoveSlovo	Optical Properties Carbon Oxidation
http://linked.open...ontrolniKodProRIV	[41A9ECB3C3FA]
http://linked.open...v/mistoKonaniAkce	Prague
http://linked.open...i/riv/mistoVydani	Prague
http://linked.open...i/riv/nazevZdroje	Proceedings of ICPIG XXVIII Conference
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanometrology using methods of scanning probe microscopy
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Ohlídal, Ivan Valtr, Miroslav Duchoň, Václav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2007-07-15 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Ústav fyziky plazmatu AV ČR
https://schema.org/isbn	978-80-87026-01-4
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Study of thickness reduction of a-C:H thin film under UV light irradiation Study of thickness reduction of a-C:H thin film under UV light irradiation Study of thickness reduction of a-C:H thin film under UV light irradiation

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