About: Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes

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About: Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Modern material technology relies increasingly on processes for surface modification and coating. Generally we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. As an optical method, SE is not affected by high temperatures, process gases, plasmas, etc. SE can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra. Modern material technology relies increasingly on processes for surface modification and coating. Generally we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. As an optical method, SE is not affected by high temperatures, process gases, plasmas, etc. SE can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra. (en)
Title	Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes (en)
skos:prefLabel	Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes (en)
skos:notation	RIV/00216224:14310/06:00016820!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika	4
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Fikar, Jan Humlíček, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	500787
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/06:00016820
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	surface treatment; spectroscopic ellipsometry; on-line monitor; closed loop control; nitriding (en)
http://linked.open.../riv/klicoveSlovo	surface treatment closed loop control spectroscopic ellipsometry on-line monitor nitriding
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[4C8EE5341B42]
http://linked.open...i/riv/nazevZdroje	Materials Science Forum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	518
http://linked.open...iv/tvurceVysledku	Humlíček, Josef Fikar, Jan Eitzinger, Christian Forsich, Christian
http://linked.open...n/vavai/riv/zamer	Physical and chemical properties of advanced materials and structures
issn	0255-5476
number of pages	8 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes

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