About: Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique

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About: Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved. This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved. (en)
Title	Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique (en)
skos:prefLabel	Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique (en)
skos:notation	RIV/00216224:14310/06:00015920!RIV10-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA106/05/0274), P(GA202/05/0777), Z(AV0Z20410507)
http://linked.open...iv/cisloPeriodika	9-20
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Sťahel, Pavel Buršíková, Vilma Buršík, Jiří Sládek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	484653
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/06:00015920
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	amorphous semiconductors; silicon; mechanical properties; creep; hardness; intendation; microintendation; ELASTIC-MODULUS; COATED SYSTEMS (en)
http://linked.open.../riv/klicoveSlovo	creep hardness mechanical properties silicon amorphous semiconductors COATED SYSTEMS ELASTIC-MODULUS intendation microintendation
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[0600FC4E83B9]
http://linked.open...i/riv/nazevZdroje	Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Multiscale approach to relationships between mechanical and microstructural characteristics of materials Plasmachemical modification of natural polymers based on cellulose in atmospheric pressure surface or coplanar barrier discharge
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	352
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, Vilma Sládek, Petr Sťahel, Pavel
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing
issn	0022-3093
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique

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