About: Carbon nanotubes deposition by plasma enhanced chemical vapor deposition

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Carbon nanotube properties provoked interest in many fields of application but there is still need to develop deposition techniques, which enable precise control of nanotubes positioning, alignment and properties. Chemical vapor deposition (CVD) methods and lately also plasma enhanced CVD (PECVD) are most promising to reach this goal. In the first part of the article we will briefly describe carbon nanotubes structure and properties and review the necessary conditions and possible control mechanisms used in PECVD deposition method. In the second part, examples of two deposition techniques, one working at a low pressure and one at an atmospheric pressure, will be described and reached results analyzed. Carbon nanotube properties provoked interest in many fields of application but there is still need to develop deposition techniques, which enable precise control of nanotubes positioning, alignment and properties. Chemical vapor deposition (CVD) methods and lately also plasma enhanced CVD (PECVD) are most promising to reach this goal. In the first part of the article we will briefly describe carbon nanotubes structure and properties and review the necessary conditions and possible control mechanisms used in PECVD deposition method. In the second part, examples of two deposition techniques, one working at a low pressure and one at an atmospheric pressure, will be described and reached results analyzed. (en)
Title	Carbon nanotubes deposition by plasma enhanced chemical vapor deposition Carbon nanotubes deposition by plasma enhanced chemical vapor deposition (en)
skos:prefLabel	Carbon nanotubes deposition by plasma enhanced chemical vapor deposition Carbon nanotubes deposition by plasma enhanced chemical vapor deposition (en)
skos:notation	RIV/00216224:14310/06:00015901!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/05/0607), Z(AV0Z20410507), Z(AV0Z20650511), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Kudrle, Vít Jašek, Ondřej Zajíčková, Lenka Eliáš, Marek Kučerová, Zuzana
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	467755
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/06:00015901
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	carbon nanotubes; plasma enhanced chemical vapor depostion; catalyst; electron microscopy (en)
http://linked.open.../riv/klicoveSlovo	electron microscopy carbon nanotubes catalyst plasma enhanced chemical vapor depostion
http://linked.open...ontrolniKodProRIV	[9BC7DBE431CB]
http://linked.open...v/mistoKonaniAkce	Brno University of technology
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Proceedings Electronic devices and systems 2006 IMAPS CS International Conference
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Synthesis of carbon micro- and nanostructures by plasma technologies
http://linked.open...UplatneniVysledku	2006
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Eliáš, Marek Jašek, Ondřej Kudrle, Vít Zajíčková, Lenka Matějková, Jiřina Rek, Antonín Studýnková, Zuzana
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2006-09-14 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Vysoké učení technické v Brně
https://schema.org/isbn	80-214-3246-2
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Carbon nanotubes deposition by plasma enhanced chemical vapor deposition Carbon nanotubes deposition by plasma enhanced chemical vapor deposition

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