About: Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD

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About: Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD Goto Sponge NotDistinct Permalink

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Description	In this paper the results of the atomic force microscopy analysis of the upper boundaries of the GaN nucleation and buffer films prepared by MOCVD are presented. It is shown that the upper boundaries of nucleation films exhibit morphology identical with statistical roughness. The values of the basic statistical roughness quantities, i.e. the RMS values of the heights and the autocorrelation length values, of these boundaries are determined in dependences on time and temperature of their annealing. These RMS values decrease with increasing values of both technological parameters. It is also found that the corresponding power spectral density functions of the upper boundaries of these films satisfy the Gaussian function very well. Furthermore, it is shown that the GaN buffer films created onto the selected nucleation film have the upper boundaries whose morphology is different from the typical statistical surface roughness. In this paper the results of the atomic force microscopy analysis of the upper boundaries of the GaN nucleation and buffer films prepared by MOCVD are presented. It is shown that the upper boundaries of nucleation films exhibit morphology identical with statistical roughness. The values of the basic statistical roughness quantities, i.e. the RMS values of the heights and the autocorrelation length values, of these boundaries are determined in dependences on time and temperature of their annealing. These RMS values decrease with increasing values of both technological parameters. It is also found that the corresponding power spectral density functions of the upper boundaries of these films satisfy the Gaussian function very well. Furthermore, it is shown that the GaN buffer films created onto the selected nucleation film have the upper boundaries whose morphology is different from the typical statistical surface roughness. (en)
Title	Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD (en)
skos:prefLabel	Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD (en)
skos:notation	RIV/00216224:14310/05:00015079!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	1-3
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	513288
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00015079
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Roughness; AFM; GaN films (en)
http://linked.open.../riv/klicoveSlovo	AFM Roughness GaN films
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[FA9E5A0DD26B]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	80
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Ohlídal, Ivan Sitter, Helmut Bonnanni, Alberta Montaigne Ramil, Alberto
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0042-207X
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD

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