About: Influence of technological conditions on mechanical stresses inside diamond-like carbon films

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Description	In this paper the influences of the technological conditions, i.e. the influences of the hydrogen flow rate and deposition time, on the values of the intrinsic mechanical stresses inside the diamond-like carbon (DLC) thin films prepared by plasma enhanced chemical vapor deposition onto silicon substrates are studied. These stresses are measured by two-beam interferometry and optical profilometry based on chromatic aberration through the measurements of deformations of the silicon substrates originating in consequence of the film stresses. It is shown that the influence of the deposition time (i.e. film thickness) on the film stress is relatively slight in contrast to the influence of the hydrogen flow rate on this quantity. It is namely shown that the film stresses are influenced by the hydrogen flow rate values in a pronounced way within the interval of interest, i.e. within the interval 1-7 sccm. In this paper the influences of the technological conditions, i.e. the influences of the hydrogen flow rate and deposition time, on the values of the intrinsic mechanical stresses inside the diamond-like carbon (DLC) thin films prepared by plasma enhanced chemical vapor deposition onto silicon substrates are studied. These stresses are measured by two-beam interferometry and optical profilometry based on chromatic aberration through the measurements of deformations of the silicon substrates originating in consequence of the film stresses. It is shown that the influence of the deposition time (i.e. film thickness) on the film stress is relatively slight in contrast to the influence of the hydrogen flow rate on this quantity. It is namely shown that the film stresses are influenced by the hydrogen flow rate values in a pronounced way within the interval of interest, i.e. within the interval 1-7 sccm. (en)
Title	Influence of technological conditions on mechanical stresses inside diamond-like carbon films Influence of technological conditions on mechanical stresses inside diamond-like carbon films (en)
skos:prefLabel	Influence of technological conditions on mechanical stresses inside diamond-like carbon films Influence of technological conditions on mechanical stresses inside diamond-like carbon films (en)
skos:notation	RIV/00216224:14310/05:00014248!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA101/04/2131), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	11-12
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Klapetek, Petr Buršíková, Vilma Franta, Daniel Ohlídal, Miloslav Čudek, Vlastimil
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	524831
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00014248
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	intrisic stress; DLC; PECVD (en)
http://linked.open.../riv/klicoveSlovo	PECVD DLC intrisic stress
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[8ED4E428F3F7]
http://linked.open...i/riv/nazevZdroje	Diamond and Related Materials
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Realization of thelaboratory digital spectrophotometer for the wide spectral region
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	14
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Klapetek, Petr Ohlídal, Ivan Ohlídal, Miloslav Páleníková, Kateřina Čudek, Vlastimil
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0925-9635
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Influence of technological conditions on mechanical stresses inside diamond-like carbon films

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