About: Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

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About: Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio phi(Ti+)/phi(Ti-n) increases by a factor of 30 when additional microwave plasma is used. This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio phi(Ti+)/phi(Ti-n) increases by a factor of 30 when additional microwave plasma is used. (en)
Title	Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements (en)
skos:prefLabel	Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements (en)
skos:notation	RIV/00216224:14310/05:00012907!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Vašina, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	543783
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00012907
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	physical vapor deposition; ionised physical vapor deposition; titanium; metal ionisation; density; magnetron (en)
http://linked.open.../riv/klicoveSlovo	magnetron density titanium ionised physical vapor deposition metal ionisation physical vapor deposition
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[60E2B3BCAEAF]
http://linked.open...i/riv/nazevZdroje	Plasma Sources Science and Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced topics in physics and chemistry of plasmas
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	14
http://linked.open...iv/tvurceVysledku	Vašina, Petr Boisse-Laporte, Caroline Bretagne, Jean Touzeau, Michel de Poucques, Ludovic Imbert, Jean-Christophe Teulé-Gay, Lionel
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0963-0252
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

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