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  • The electron energy distribution (EED) was measured by means of the Langmuir probe in hydrogen capacitively coupled rf discharge at three different pressures (2.5, 10 and 85\,Pa). In order to obtain the spatially resolved EEDs the probe tip was moved along the discharge axis and the plasma parameters were measured at different distances from the electrodes. An unusually high electron energy at the lowest pressure was observed having its maximum at the sheath edge, where the maximum of the electron concentration was also located. On the other hand, at higher pressures the electron concentration was maximum inside the plasma bulk. When the pressure was increased, the increase of the electron concentration, decrease of the mean electron energy, changes of the nonlocal discharge character towards the local character and the development of the sheath at the grounded electrode were observed. A high-energy group of electrons coming from the sheaths at the highest pressure was detected.
  • The electron energy distribution (EED) was measured by means of the Langmuir probe in hydrogen capacitively coupled rf discharge at three different pressures (2.5, 10 and 85\,Pa). In order to obtain the spatially resolved EEDs the probe tip was moved along the discharge axis and the plasma parameters were measured at different distances from the electrodes. An unusually high electron energy at the lowest pressure was observed having its maximum at the sheath edge, where the maximum of the electron concentration was also located. On the other hand, at higher pressures the electron concentration was maximum inside the plasma bulk. When the pressure was increased, the increase of the electron concentration, decrease of the mean electron energy, changes of the nonlocal discharge character towards the local character and the development of the sheath at the grounded electrode were observed. A high-energy group of electrons coming from the sheaths at the highest pressure was detected. (en)
Title
  • Spatially resolved probe measurements in hydrogen rf discharges
  • Spatially resolved probe measurements in hydrogen rf discharges (en)
skos:prefLabel
  • Spatially resolved probe measurements in hydrogen rf discharges
  • Spatially resolved probe measurements in hydrogen rf discharges (en)
skos:notation
  • RIV/00216224:14310/05:00012710!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
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  • 543798
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  • RIV/00216224:14310/05:00012710
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma hydrogen discharge Langmuir probe (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BB0847ABAB01]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
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  • Proceedings of the 14th Annual Conference of Doctoral Students - WDS 2005
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Dvořák, Pavel
  • Janča, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Matfyzpress
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  • 80-86732-59-2
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  • 14310
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