About: Energy distribution of hydrogen ions in capacitively coupled low pressure discharge

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About: Energy distribution of hydrogen ions in capacitively coupled low pressure discharge Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The H3+, H2+ and H+ ion energy distributions (IEDs) were recorded in the 13.56 MHz hydrogen glow discharges with the energy dispersive quadrupole mass spectrometer (PPM 421) horizontally mounted between the discharge electrodes. The discharge was capacitively coupled with an asymmetric arrangement. The measurements were spatially resolved along the discharge axis, i.e. perpendicular to the electrodes, and reflected the ion flux to the grounded PPM extraction orifice 15 mm aside the electrodes. The IEDs of H3+ and H+ revealed a saddle structure that was suppressed by an effect of collisions in case of H2+. The H+ with energies up to 10 eV higher than the maximum energy of the saddle structure were observed and explained by a dissociative ionization of H2. We proved an appreciable impedance of the plasma glow region from the width changes of the saddle structure. The effect of pressure and rf power on the IEDs was studied for a fixed position at the glow region. The H3+, H2+ and H+ ion energy distributions (IEDs) were recorded in the 13.56 MHz hydrogen glow discharges with the energy dispersive quadrupole mass spectrometer (PPM 421) horizontally mounted between the discharge electrodes. The discharge was capacitively coupled with an asymmetric arrangement. The measurements were spatially resolved along the discharge axis, i.e. perpendicular to the electrodes, and reflected the ion flux to the grounded PPM extraction orifice 15 mm aside the electrodes. The IEDs of H3+ and H+ revealed a saddle structure that was suppressed by an effect of collisions in case of H2+. The H+ with energies up to 10 eV higher than the maximum energy of the saddle structure were observed and explained by a dissociative ionization of H2. We proved an appreciable impedance of the plasma glow region from the width changes of the saddle structure. The effect of pressure and rf power on the IEDs was studied for a fixed position at the glow region. (en)
Title	Energy distribution of hydrogen ions in capacitively coupled low pressure discharge Energy distribution of hydrogen ions in capacitively coupled low pressure discharge (en)
skos:prefLabel	Energy distribution of hydrogen ions in capacitively coupled low pressure discharge Energy distribution of hydrogen ions in capacitively coupled low pressure discharge (en)
skos:notation	RIV/00216224:14310/05:00012694!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/03/H162), Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Janča, Jan Zajíčková, Lenka Dvořák, Pavel Jánský, Jaroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	520276
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/05:00012694
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	IED hydrogen capacitively coupled low-pressure discharge plasma (en)
http://linked.open.../riv/klicoveSlovo	IED hydrogen capacitively coupled low-pressure discharge plasma
http://linked.open...odStatuVydavatele	SK - Slovenská republika
http://linked.open...ontrolniKodProRIV	[D49A1BBB53B4]
http://linked.open...i/riv/nazevZdroje	Acta physica slovaca
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced topics in physics and chemistry of plasmas
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	55
http://linked.open...iv/tvurceVysledku	Dvořák, Pavel Janča, Jan Jánský, Jaroslav Zajíčková, Lenka
http://linked.open...ain/vavai/riv/wos	000232386500004
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
issn	0323-0465
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	14310

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