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  • In this paper the influence of the technological conditions, i.e. As concentration, UV iradiation and anealing, on the optical constants, thickness and material parameters of chalcogenide As-S thin films is studied. For determining the values of the parameters mentioned the optical method based on interpreting experimental data consiting of spectral dependences of the transmittance measured at normal incidence and spectral dependences of the ellipsometric quantities measured for several incidence angles is used. Within the interpretation of the experimental data the Jellison-Modine dispersion model is employed. It is shown that this dispersion model is not suitable for interpreting the spectral dependences of the transmittance of the films studied. Moreover, within the interpretation of the experimental data the physical model containing on isotropic inhomogeneous layer covered with a non-absorbing overlayer is employed for representing the films under investigation.
  • In this paper the influence of the technological conditions, i.e. As concentration, UV iradiation and anealing, on the optical constants, thickness and material parameters of chalcogenide As-S thin films is studied. For determining the values of the parameters mentioned the optical method based on interpreting experimental data consiting of spectral dependences of the transmittance measured at normal incidence and spectral dependences of the ellipsometric quantities measured for several incidence angles is used. Within the interpretation of the experimental data the Jellison-Modine dispersion model is employed. It is shown that this dispersion model is not suitable for interpreting the spectral dependences of the transmittance of the films studied. Moreover, within the interpretation of the experimental data the physical model containing on isotropic inhomogeneous layer covered with a non-absorbing overlayer is employed for representing the films under investigation. (en)
  • V článku je studován vliv technologických podmínek, tj. koncentrace As, UV záření a zahřívání, na optické konstanty, tloušťku a materiálové parametry tenkých vrstev chalkogenidů typu As-S. Pro určení hodnot těchto parametrů je využita optická metoda založená na interpretaci experimentálních dat sestávajících se spektrálních závislostí propustnosti měřené při kolmém dopadu světla a spektrálních závislostí elipsometrických veličin měřených v několika úhlech dopadu. V rámci interpretace experimentálních dat je využit Jellison-Modine dispersní model. V práci jsme ukázáno, že tento dispersní model není vhodný pro interpretaci spektrálních závislostí propustnosti studovaných tenkých vrstev. Navíc je při interpretaci experimentálních dat využit fyzikální model obsahující isotropní nehomogenní vrstvu pokrytou neabsorbující povrchovou vrstvou. (cs)
Title
  • Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films
  • Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films (en)
  • Vliv složení, exposice a tepelného zahřívání na optické vlastnosti tenkých vrstev As-S chalkogenidů (cs)
skos:prefLabel
  • Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films
  • Influence of Composition, Exposure and Thermal Annealing on Optical Properties of As-S Chalcogenide Thin Films (en)
  • Vliv složení, exposice a tepelného zahřívání na optické vlastnosti tenkých vrstev As-S chalkogenidů (cs)
skos:notation
  • RIV/00216224:14310/04:00011460!RIV08-GA0-14310___
http://linked.open.../vavai/riv/strany
  • 139-148
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA203/00/0085)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
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http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 567839
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/04:00011460
http://linked.open...riv/jazykVysledku
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  • As-S chalcogenide films; Ellipsometry; Combined spectrophotometric method; Amorphous materials; Optical constants (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • RO - Rumunsko
http://linked.open...ontrolniKodProRIV
  • [8528D72B9CC6]
http://linked.open...i/riv/nazevZdroje
  • Journal of Optoelectronics and Advanced Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 6
http://linked.open...iv/tvurceVysledku
  • Franta, Daniel
  • Ohlídal, Ivan
  • Frumar, Miroslav
  • Jedelský, Jaroslav
  • Omasta, Jaroslav
issn
  • 1454-4164
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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