Práce popisuje myšlenky, motivaci a plán pro projekt laboratoře čistých prostor pro křemíkovou technologii čipů na Masarykově univerzitě. (cs)
The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University.
The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University. (en)