About: X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers     Goto   Sponge   NotDistinct   Permalink

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Description
  • Použitím rentgenové difrakce s vysokým rozlišením (HRXRD) jsme studovali dusíkem dopované křemíkové desky (001). Mapy rozložení intenzity v reciprokém prostoru od shluků defektů, vrstevných chyb a dislokačních smyček byly modelovány použitím Krivoglazovy teorie a kontinuálního modelu deformačního pole defektu. Dobré shody teorie s experimentálními daty bylo dosaženo pro dislokační smyčky. Symetrie naměřených map reciprokého prostoru určují typ dislokačních smyček a z radiálního řezu mapou můžeme určit jejich poloměr a koncentraci. Tyto výsledky jsme porovnaly s výsledky infračervené absorpční spektroskopie. (cs)
  • We have studied nitrogen-doped silicon wafers (001) using triple-axis high-resolution X-ray diffraction (HRXRD). The reciprocal space intensity distributions from clusters, stacking faults and dislocation loops were modelled using the Krivoglaz theory and a continuum model of the defect deformation field. Good agreement of the theory with the experimental data was achieved for the model of dislocation loops. The symmetry of measured reciprocal space map determines the type of dislocation loops and from cross section we can determine their radius and concentration. These parameters were combined with the results from infrared absorption spectroscopy method.
  • We have studied nitrogen-doped silicon wafers (001) using triple-axis high-resolution X-ray diffraction (HRXRD). The reciprocal space intensity distributions from clusters, stacking faults and dislocation loops were modelled using the Krivoglaz theory and a continuum model of the defect deformation field. Good agreement of the theory with the experimental data was achieved for the model of dislocation loops. The symmetry of measured reciprocal space map determines the type of dislocation loops and from cross section we can determine their radius and concentration. These parameters were combined with the results from infrared absorption spectroscopy method. (en)
Title
  • Rentgenový difúzní rozptyl od defektů v dusíkem legovaných křemíkových deskách připravených Czochralského metodou (cs)
  • X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers
  • X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers (en)
skos:prefLabel
  • Rentgenový difúzní rozptyl od defektů v dusíkem legovaných křemíkových deskách připravených Czochralského metodou (cs)
  • X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers
  • X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers (en)
skos:notation
  • RIV/00216224:14310/04:00010934!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany
  • 53
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 143100002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 595305
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/04:00010934
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • X-ray; Diffuse Scattering; Defect; Silicon; Nitrogen doping (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [A96353E16F1F]
http://linked.open...v/mistoKonaniAkce
  • Rožnov pod Radhoštěm, Česká republika
http://linked.open...i/riv/mistoVydani
  • Rožnov pod Radhoštěm, Česká republika
http://linked.open...i/riv/nazevZdroje
  • Proceedings of The Ninth Scientific and Business Conference SILICON 2004
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Holý, Václav
  • Šik, Jan
  • Štoudek, Richard
  • Klang, Pavel
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • TECON Scientific, s.r.o.
http://localhost/t...ganizacniJednotka
  • 14310
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