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rdf:type
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Description
| - Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.
- Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too. (en)
- Výsledky optické emisní a absorpční spektroskopie z reaktoru obsahujícího magnetron a dvě mikrovlnné antény jsou diskutovány společně s výsledky vrstev z rastrovacího elektronového mikroskopu. (cs)
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Title
| - Prostorově rozložení částic v IPVD reactorem (cs)
- Spatial Distribution of Species in an IPVD reactor
- Spatial Distribution of Species in an IPVD reactor (en)
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skos:prefLabel
| - Prostorově rozložení částic v IPVD reactorem (cs)
- Spatial Distribution of Species in an IPVD reactor
- Spatial Distribution of Species in an IPVD reactor (en)
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skos:notation
| - RIV/00216224:14310/03:00025490!RIV09-MSM-14310___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/03:00025490
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
| - Charles University in Prague, Faculty of Matema
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - WDS 03 Proceeding of Contributed Papers
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Vašina, Petr
- Boisse-Laporte, Caroline
- Touzeau, Michel
- de Poucques, Ludovic
- Bublan, Martin
- Imbert, Jean-Christophe
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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