About: Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined. Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined. (en) Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined. (cs)
Title	Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films (en) Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films (cs)
skos:prefLabel	Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films (en) Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films (cs)
skos:notation	RIV/00216224:14310/03:00008312!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany	197-198
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/01/1110), P(ME 489), P(OC 527.20), Z(MSM 143100003)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Janča, Jan Klapetek, Petr Zajíčková, Lenka Buršíková, Vilma Dvořák, Pavel Buršík, Jiří
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	605218
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/03:00008312
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	discharge conditions; mechanical properties; plasma deposited films (en)
http://linked.open.../riv/klicoveSlovo	mechanical properties discharge conditions plasma deposited films
http://linked.open...ontrolniKodProRIV	[54B026B509D2]
http://linked.open...v/mistoKonaniAkce	Bobrovník, Slovak republic
http://linked.open...i/riv/mistoVydani	Bratislava, Slovak Republic
http://linked.open...i/riv/nazevZdroje	Proceedings of SAPP XIV
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20489 Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.20
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, Vilma Dvořák, Pavel Janča, Jan Klapetek, Petr Zajíčková, Lenka
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-01-13 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20143100003
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Pavol Šutta, Jarmila Mullerová, and Róbert Brunner
https://schema.org/isbn	80-8040-195-0
http://localhost/t...ganizacniJednotka	14310

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