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  • The current-voltage characteristics were measured by r.f. compensated Langmuir probe in capacitevely coupled r.f. discharges. Two different gases, argon and nitrogen, were used. From I-V curves were taken main parameters as a plasma and floating potentials, electron temperature, electron concentration, and mean electron energy and their dependence on input power over the range from 5 to 40 W, distance between electrodes and probe position in radial axe in gas pressure between 0.43 and 4.3 Pa.
  • The current-voltage characteristics were measured by r.f. compensated Langmuir probe in capacitevely coupled r.f. discharges. Two different gases, argon and nitrogen, were used. From I-V curves were taken main parameters as a plasma and floating potentials, electron temperature, electron concentration, and mean electron energy and their dependence on input power over the range from 5 to 40 W, distance between electrodes and probe position in radial axe in gas pressure between 0.43 and 4.3 Pa. (en)
  • Voltampérová charakteristika Langmuirovy sondy měřena v kapacitně vázaném rf výbojích, ve dvou ruzných plynech, argonu a dusíku. Z VA charakteristik byly získány hlavní parametry-plazmový a plovoucí potenciál, koncentrace a teplota elektronů, jejich střední energie a závislosti těchto parametrů na výkonu a vzdálenosti mezi elektrodami a pozici sondy vzhledem ke středu reaktoru, při tlacích 0,43-4,3 Pa. (cs)
Title
  • Sondové měření v kapacitně vázaném výboji (cs)
  • Probe measurements in capacitively coupled rf discharge
  • Probe measurements in capacitively coupled rf discharge (en)
skos:prefLabel
  • Sondové měření v kapacitně vázaném výboji (cs)
  • Probe measurements in capacitively coupled rf discharge
  • Probe measurements in capacitively coupled rf discharge (en)
skos:notation
  • RIV/00216224:14310/01:00009846!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany
  • 435-438
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  • Z(MSM 143100003)
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  • 692942
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  • RIV/00216224:14310/01:00009846
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  • capacitevely coupled r.f. discharge; Langmuir probe (en)
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  • [E39BDC67CD57]
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  • Praha
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  • Praha
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  • WDS'01, Proceedings of contributed papers, Part II, Physics of Plasmas and Ionized Media
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  • Dvořák, Pavel
  • Zajíčková, Lenka
  • Šmíd, Radek
http://linked.open...vavai/riv/typAkce
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http://linked.open...n/vavai/riv/zamer
number of pages
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  • MATFYZPRESS
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  • 80-85863-73-1
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  • 14310
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