| Attributes | Values |
|---|
| rdf:type
| |
| Description
| - Study of the properties of silicon doped DLC films deposited in rf low pressure discharges. Investigation of the influence of the deposition parameters on the film properties.
- Study of the properties of silicon doped DLC films deposited in rf low pressure discharges. Investigation of the influence of the deposition parameters on the film properties. (en)
- Study of the properties of silicon doped DLC films deposited in rf low pressure discharges. Investigation of the influence of the deposition parameters on the film properties. (cs)
|
| Title
| - Deposition of DLC:Si(O) Films in Low Pressure Discharges
- Deposition of DLC:Si(O) Films in Low Pressure Discharges (en)
- Deposition of DLC:Si(O) Films in Low Pressure Discharges (cs)
|
| skos:prefLabel
| - Deposition of DLC:Si(O) Films in Low Pressure Discharges
- Deposition of DLC:Si(O) Films in Low Pressure Discharges (en)
- Deposition of DLC:Si(O) Films in Low Pressure Discharges (cs)
|
| skos:notation
| - RIV/00216224:14310/01:00003099!RIV08-MSM-14310___
|
| http://linked.open.../vavai/riv/strany
| |
| http://linked.open...avai/riv/aktivita
| |
| http://linked.open...avai/riv/aktivity
| - P(GA202/00/P037), P(ME 301), P(ME 367), P(OC 527.20), Z(MSM 143100003)
|
| http://linked.open...vai/riv/dodaniDat
| |
| http://linked.open...aciTvurceVysledku
| |
| http://linked.open.../riv/druhVysledku
| |
| http://linked.open...iv/duvernostUdaju
| |
| http://linked.open...titaPredkladatele
| |
| http://linked.open...dnocenehoVysledku
| |
| http://linked.open...ai/riv/idVysledku
| - RIV/00216224:14310/01:00003099
|
| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - DLC; Plasma Enhanced CVD; RF Discharges (en)
|
| http://linked.open.../riv/klicoveSlovo
| |
| http://linked.open...ontrolniKodProRIV
| |
| http://linked.open...v/mistoKonaniAkce
| - 15.-21. 1. 2001, Tale, Low Tatras (Slovakia)
|
| http://linked.open...i/riv/mistoVydani
| |
| http://linked.open...i/riv/nazevZdroje
| - Proceedings of 13th Symposium on Application of Plasma Processes
|
| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
| |
| http://linked.open...vavai/riv/projekt
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...iv/tvurceVysledku
| - Buršíková, Vilma
- Janča, Jan
- Macková, Anna
- Zajíčková, Lenka
- Peřina, Vratislav
|
| http://linked.open...vavai/riv/typAkce
| |
| http://linked.open.../riv/zahajeniAkce
| |
| http://linked.open...n/vavai/riv/zamer
| |
| number of pages
| |
| http://purl.org/ne...btex#hasPublisher
| - Univerzita Komenského v Bratislave. Katedra fyziky plazmy & Fyzikálny ústav
|
| https://schema.org/isbn
| |
| http://localhost/t...ganizacniJednotka
| |
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