About: Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis and ab-initio simulations     Goto   Sponge   NotDistinct   Permalink

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Description
  • Hydrogen implanted silicon has been studied using high resolution X-ray scattering. Strain induced by implantation has been measured as a function of implantation dose. The dependence of strain with implanted dose shows different regimes starting from linear to quadratic and saturation. The observed strain is consistent with ab-initio and elasticity calculations. Strain rate changes can be associated to the predominant location of hydrogen in bond center location. (C) 2013 AIP Publishing LLC
  • Hydrogen implanted silicon has been studied using high resolution X-ray scattering. Strain induced by implantation has been measured as a function of implantation dose. The dependence of strain with implanted dose shows different regimes starting from linear to quadratic and saturation. The observed strain is consistent with ab-initio and elasticity calculations. Strain rate changes can be associated to the predominant location of hydrogen in bond center location. (C) 2013 AIP Publishing LLC (en)
Title
  • Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis and ab-initio simulations
  • Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis and ab-initio simulations (en)
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  • Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis and ab-initio simulations
  • Lattice strain of hydrogen-implanted silicon: Correlation between X-ray scattering analysis and ab-initio simulations (en)
skos:notation
  • RIV/00216208:11320/13:10140012!RIV14-MSM-11320___
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  • I
http://linked.open...iv/cisloPeriodika
  • 15
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  • 84421
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  • RIV/00216208:11320/13:10140012
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  • simulations; ab-initio; analysis; scattering; X-ray; between; Correlation; silicon; hydrogen-implanted; strain; Lattice (en)
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  • US - Spojené státy americké
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  • [C7FEB6C75B19]
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  • Journal of Applied Physics
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  • 113
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  • Holý, Václav
  • Valeš, Václav
  • Bilteanu, L.
  • Capello, L.
  • Crocombette, J. P.
  • Mazen, F.
  • Penot, J. D.
  • Reboh, S.
  • Rieutord, F.
http://linked.open...ain/vavai/riv/wos
  • 000318251400017
issn
  • 0021-8979
number of pages
http://bibframe.org/vocab/doi
  • 10.1063/1.4800538
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  • 11320
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