About: Computational Study of Sheath Structure in the Presence of Magnetic Field

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_215_f2_Ibehej.pdf
Description	The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate. The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions. This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids. The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma probe diagnostics. The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate. The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions. This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids. The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma probe diagnostics. (en)
Title	Computational Study of Sheath Structure in the Presence of Magnetic Field Computational Study of Sheath Structure in the Presence of Magnetic Field (en)
skos:prefLabel	Computational Study of Sheath Structure in the Presence of Magnetic Field Computational Study of Sheath Structure in the Presence of Magnetic Field (en)
skos:notation	RIV/00216208:11320/12:10133152!RIV13-MSM-11320___
http://linked.open...avai/predkladatel	Matematicko-fyzikální fakulta
http://linked.open...avai/riv/aktivita	S
http://linked.open...avai/riv/aktivity	S
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Hrach, Rudolf Ibehej, Tomáš
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Karlova v Praze / Matematicko-fyzikální fakulta
http://linked.open...dnocenehoVysledku	128298
http://linked.open...ai/riv/idVysledku	RIV/00216208:11320/12:10133152
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Magnetic field; Plasmas sheath structure (en)
http://linked.open.../riv/klicoveSlovo	Magnetic field Plasmas sheath structure
http://linked.open...ontrolniKodProRIV	[5E0AA9F3A261]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	WDS'12 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Ibehej, Tomáš
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-05-29 (xsd:date)
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Matfyzpress
https://schema.org/isbn	978-80-7378-225-2
http://localhost/t...ganizacniJednotka	11320
is http://linked.open...avai/riv/vysledek of	Computational Study of Sheath Structure in the Presence of Magnetic Field

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