About: Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System

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Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf
Description	We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the distance from the cathode, on the pressure in the reactor chamber and on the input flow of the working gas were measured. We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the distance from the cathode, on the pressure in the reactor chamber and on the input flow of the working gas were measured. (en)
Title	Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System (en)
skos:prefLabel	Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System (en)
skos:notation	RIV/00216208:11320/11:10109807!RIV12-GA0-11320___
http://linked.open...avai/predkladatel	Matematicko-fyzikální fakulta
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GD202/08/H057), S, Z(MSM0021620834)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Tichý, Milan Kudrna, Pavel Klusoň, Jan
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Karlova v Praze / Matematicko-fyzikální fakulta
http://linked.open...dnocenehoVysledku	211103
http://linked.open...ai/riv/idVysledku	RIV/00216208:11320/11:10109807
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Sputtering; Hollow cathode plasma jet (en)
http://linked.open.../riv/klicoveSlovo	Hollow cathode plasma jet Sputtering
http://linked.open...ontrolniKodProRIV	[D5266900F244]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	WDS'11 Proceedings of Contributed Papers: Part II – Physics of Plasmas and Ionized Media
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Modern trends in plasma physics
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Kudrna, Pavel Tichý, Milan Klusoň, Jan
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2011-05-31 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Matfyzpress
https://schema.org/isbn	978-80-7378-185-9
http://localhost/t...ganizacniJednotka	11320
is http://linked.open...avai/riv/vysledek of	Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System

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