About: X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor     Goto   Sponge   NotDistinct   Permalink

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Description
  • For advanced electronic, optoelectronic, or mechanical nanoscale devices a detailed understanding of their structural properties and in particular the strain state within their active region is of utmost importance. We demonstrate that X-ray nanodiffraction represents an excellent tool to investigate the internal structure of such devices in a nondestructive way by using a focused synchotron X-ray beam with a diameter of 400 nm. We show results on the strain fields in and around a single SiGe island, which serves as stressor for the Si-channel in a fully functioning Si-metal-oxide semiconductor field-effect transistor.
  • For advanced electronic, optoelectronic, or mechanical nanoscale devices a detailed understanding of their structural properties and in particular the strain state within their active region is of utmost importance. We demonstrate that X-ray nanodiffraction represents an excellent tool to investigate the internal structure of such devices in a nondestructive way by using a focused synchotron X-ray beam with a diameter of 400 nm. We show results on the strain fields in and around a single SiGe island, which serves as stressor for the Si-channel in a fully functioning Si-metal-oxide semiconductor field-effect transistor. (en)
Title
  • X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor
  • X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor (en)
skos:prefLabel
  • X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor
  • X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor (en)
skos:notation
  • RIV/00216208:11320/11:10103789!RIV12-MSM-11320___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • 7
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 241995
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/11:10103789
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Transistor; Functioning Field-Effect; inside; Dot; Quantum; SiGe; Single; Nanodiffraction; X-ray (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [299F89E615AB]
http://linked.open...i/riv/nazevZdroje
  • Nano Letters
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 11
http://linked.open...iv/tvurceVysledku
  • Holý, Václav
  • Stangl, J.
  • Bauer, G.
  • Biasotto, C.
  • Carbone, D.
  • Etzelstorfer, T.
  • Grutzmacher, D.
  • Hrauda, N.
  • Jovanovic, V.
  • Mandl, B.
  • Moers, J.
  • Nanver, LK
  • Wintersberger, E.
  • Zhang, JJ
http://linked.open...ain/vavai/riv/wos
  • 000292849400054
http://linked.open...n/vavai/riv/zamer
issn
  • 1530-6984
number of pages
http://bibframe.org/vocab/doi
  • 10.1021/nl2013289
http://localhost/t...ganizacniJednotka
  • 11320
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