About: A Study of the Low Pressure Hollow Cathode Plasma Jet Discharge in the Pulsed Regime     Goto   Sponge   NotDistinct   Permalink

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  • In this paper we present experimental results from two distinct measurements performed in the low pressure plasma jet sputtering system in the pulsed regime of plasma excitation.
  • In this paper we present experimental results from two distinct measurements performed in the low pressure plasma jet sputtering system in the pulsed regime of plasma excitation. (en)
Title
  • A Study of the Low Pressure Hollow Cathode Plasma Jet Discharge in the Pulsed Regime
  • A Study of the Low Pressure Hollow Cathode Plasma Jet Discharge in the Pulsed Regime (en)
skos:prefLabel
  • A Study of the Low Pressure Hollow Cathode Plasma Jet Discharge in the Pulsed Regime
  • A Study of the Low Pressure Hollow Cathode Plasma Jet Discharge in the Pulsed Regime (en)
skos:notation
  • RIV/00216208:11320/10:10080637!RIV11-GA0-11320___
http://linked.open...avai/riv/aktivita
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  • P(GA202/07/0044), P(GA202/09/0800), P(GD202/08/H057), S, Z(MSM0021620834)
http://linked.open...vai/riv/dodaniDat
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  • 244997
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  • RIV/00216208:11320/10:10080637
http://linked.open...riv/jazykVysledku
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  • Langmuir probe; pulsed regime; Hollow cathode plasma jet (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BA3B9A7D5473]
http://linked.open...v/mistoKonaniAkce
  • Praha
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  • Praha
http://linked.open...i/riv/nazevZdroje
  • WDS'10 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
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  • Rubovič, Peter
  • Leshkov, Sergey
  • Kudrna, Pavel
  • Tichý, Milan
  • Klusoň, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
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number of pages
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  • Matfyzpress
https://schema.org/isbn
  • 978-80-7378-140-8
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  • 11320
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