About: Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy     Goto   Sponge   NotDistinct   Permalink

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  • Thickness, composition, concentration depth profile and ion irradiation effects on uranium nitride thin films deposited on fused silica have been investigated by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The films were prepared by reactive DC sputtering at the temperatures of -200 C, +25 C and +300 C. A perfect 1U:1N stoichiometry with a layer thickness of 660 nm was found for the film deposited at -200 C. An increase of the deposition temperature led to an enhancement of surface oxidation and an increase of the thickness of the mixed U-N-Si-O layers at the interface.
  • Thickness, composition, concentration depth profile and ion irradiation effects on uranium nitride thin films deposited on fused silica have been investigated by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The films were prepared by reactive DC sputtering at the temperatures of -200 C, +25 C and +300 C. A perfect 1U:1N stoichiometry with a layer thickness of 660 nm was found for the film deposited at -200 C. An increase of the deposition temperature led to an enhancement of surface oxidation and an increase of the thickness of the mixed U-N-Si-O layers at the interface. (en)
Title
  • Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy
  • Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy (en)
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  • Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy
  • Ion beam mixing in uranium nitride thin films studied by Rutherford Backscattering Spectroscopy (en)
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  • RIV/00216208:11320/10:10057484!RIV11-MSM-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA100100912), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • 11-12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 264894
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/10:10057484
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Spectroscopy; Backscattering; Rutherford; thin films; nitride; uranium; mixing; beam; Ion (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [1C0BD37045FE]
http://linked.open...i/riv/nazevZdroje
  • Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 268
http://linked.open...iv/tvurceVysledku
  • Balogh, A. G.
  • Gouder, T.
  • Havela, Ladislav
  • Kim-Ngan, N. T. H.
http://linked.open...ain/vavai/riv/wos
  • 000278702300040
http://linked.open...n/vavai/riv/zamer
issn
  • 0168-583X
number of pages
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  • 11320
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