About: Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability     Goto   Sponge   NotDistinct   Permalink

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  • DC energized hollow cathode plasma jet system was examined by moveable Langmuir probe. Spatial distribution of electron concentration, plasma and floating potentials and mean electron energy were obtained from measured probe characteristics. The radial dependence of plasma parameters was measured for distances from the system axis 0-120 mm. Temporal dependences of main plasma parameters for discharges in clean argon and argon-oxygen mixture were obtained from probe voltage current characteristics. The system with Ti nozzle permits deposition of pure Ti as well as its compounds with active working gas admixtures such as O2, N2, etc. TiOx thin films were deposited onto glass substrates and examined by AFM and elipsometry.
  • DC energized hollow cathode plasma jet system was examined by moveable Langmuir probe. Spatial distribution of electron concentration, plasma and floating potentials and mean electron energy were obtained from measured probe characteristics. The radial dependence of plasma parameters was measured for distances from the system axis 0-120 mm. Temporal dependences of main plasma parameters for discharges in clean argon and argon-oxygen mixture were obtained from probe voltage current characteristics. The system with Ti nozzle permits deposition of pure Ti as well as its compounds with active working gas admixtures such as O2, N2, etc. TiOx thin films were deposited onto glass substrates and examined by AFM and elipsometry. (en)
Title
  • Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability
  • Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability (en)
skos:prefLabel
  • Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability
  • Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability (en)
skos:notation
  • RIV/00216208:11320/09:00207251!RIV10-GA0-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/07/0044), P(GA202/09/0800), S, Z(MSM0021620834)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 342738
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/09:00207251
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Spatial; Distribution; Plasma; Parameters; DC-energized; Hollow; Cathode; Plasma; System; Stability (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [B9F016A956A0]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Leshkov, Sergey
  • Kudrna, Pavel
  • Picková, Irena
  • Tichý, Milan
  • Klusoň, Jan
  • Chichina, Mariya
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Matfyzpress
https://schema.org/isbn
  • 978-80-7378-102-6
http://localhost/t...ganizacniJednotka
  • 11320
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