About: XRD study of thickness dependence of crystallization and stresses in TiO2 thin films     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • In this work a complex X-ray diffraction (XRD) study of thin TiO2 films on Si substrates with different thicknesses (50-2000 nm) prepared by magnetron sputtering is presented. Crystallisation process of amorphous films was studied in-situ. XRD reflectivity, texture and stress measurements were performed ex-situ. Other amorphous and nanocrystalline powders were also measured for comparison.
  • In this work a complex X-ray diffraction (XRD) study of thin TiO2 films on Si substrates with different thicknesses (50-2000 nm) prepared by magnetron sputtering is presented. Crystallisation process of amorphous films was studied in-situ. XRD reflectivity, texture and stress measurements were performed ex-situ. Other amorphous and nanocrystalline powders were also measured for comparison. (en)
Title
  • XRD study of thickness dependence of crystallization and stresses in TiO2 thin films
  • XRD study of thickness dependence of crystallization and stresses in TiO2 thin films (en)
skos:prefLabel
  • XRD study of thickness dependence of crystallization and stresses in TiO2 thin films
  • XRD study of thickness dependence of crystallization and stresses in TiO2 thin films (en)
skos:notation
  • RIV/00216208:11320/09:00207040!RIV10-MSM-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • 2a
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 352156
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/09:00207040
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • study; thickness; dependence; crystallization; stresses; films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [69BBE62473FB]
http://linked.open...i/riv/nazevZdroje
  • Materials Structure in Chemistry. Biology. Physics and Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 16
http://linked.open...iv/tvurceVysledku
  • Matěj, Zdeněk
  • Šícha, Jan
  • Kužel, Radomír
  • Nichtová, Lea
http://linked.open...n/vavai/riv/zamer
issn
  • 1211-5894
number of pages
http://localhost/t...ganizacniJednotka
  • 11320
is http://linked.open...avai/riv/vysledek of
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software