About: Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Their dependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis. The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Their dependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis. (en)
Title	Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime (en)
skos:prefLabel	Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime (en)
skos:notation	RIV/00216208:11320/09:00206835!RIV10-GA0-11320___
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/07/0044), P(GD202/03/H162), S, Z(MSM0021620834)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Tichý, Milan Kudrna, Pavel Picková, Irena Klusoň, Jan Leshkov, Sergey Chichina, Mariya
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Karlova v Praze / Matematicko-fyzikální fakulta
http://linked.open...dnocenehoVysledku	323171
http://linked.open...ai/riv/idVysledku	RIV/00216208:11320/09:00206835
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Langmuir; Probe; Diagnostics; Hollow; Cathode; Discharge; Pulsed; Regime (en)
http://linked.open.../riv/klicoveSlovo	Discharge Regime Diagnostics Hollow Cathode Probe Pulsed Langmuir
http://linked.open...ontrolniKodProRIV	[937DDF41AC4C]
http://linked.open...v/mistoKonaniAkce	Prague
http://linked.open...i/riv/mistoVydani	Prague
http://linked.open...i/riv/nazevZdroje	WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Nonlinear Effects Near Antennas in Tokamaks Advanced topics in physics and chemistry of plasmas
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Leshkov, Sergey Kudrna, Pavel Picková, Irena Tichý, Milan Klusoň, Jan Hubička, Z. Chichina, Mariya
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2009-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Matfyzpress
https://schema.org/isbn	978-80-7378-102-6
http://localhost/t...ganizacniJednotka	11320
is http://linked.open...avai/riv/vysledek of	Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software