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Description
  • The thermally activated Ti-Zr-V non-evaporable getter (NEG) film has been studied by means of X-ray photoelectron spectroscopy and low energy ion scattering. Depth profiling technique has been used to establish the location of different components in the near-surface region. Residual oxide observed even on fully activated NEG surface consists mostly of zirconium and titanium low valence suboxides that are located mainly in the top surface layer. Carbides formed during the activation process remain on the surface and their concentration drops strongly with depth.
  • The thermally activated Ti-Zr-V non-evaporable getter (NEG) film has been studied by means of X-ray photoelectron spectroscopy and low energy ion scattering. Depth profiling technique has been used to establish the location of different components in the near-surface region. Residual oxide observed even on fully activated NEG surface consists mostly of zirconium and titanium low valence suboxides that are located mainly in the top surface layer. Carbides formed during the activation process remain on the surface and their concentration drops strongly with depth. (en)
Title
  • Surface characterization of activated Ti-Zr-V NEG coatings
  • Surface characterization of activated Ti-Zr-V NEG coatings (en)
skos:prefLabel
  • Surface characterization of activated Ti-Zr-V NEG coatings
  • Surface characterization of activated Ti-Zr-V NEG coatings (en)
skos:notation
  • RIV/00216208:11320/09:00206518!RIV10-MSM-11320___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • 5
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 344759
http://linked.open...ai/riv/idVysledku
  • RIV/00216208:11320/09:00206518
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Surface; characterization; activated; Ti-Zr-V; coatings (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [208711B3B73F]
http://linked.open...i/riv/nazevZdroje
  • Vacuum
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 83
http://linked.open...iv/tvurceVysledku
  • Matolín, Vladimír
  • Mašek, Karel
  • Šutara, František
  • Skála, T.
http://linked.open...ain/vavai/riv/wos
  • 000262133500009
http://linked.open...n/vavai/riv/zamer
issn
  • 0042-207X
number of pages
http://localhost/t...ganizacniJednotka
  • 11320
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