About: Large area high-speed metrology SPM system

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://stacks.iop.org/0957-4484/26/065501
Description	We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are also discussed. Both techniques are shown to successfully enable high- resolution, large area images to be generated at least an order of magnitude faster than with a conventional atomic force microscope. We present a large area high-speed measuring system capable of rapidly generating nanometre resolution scanning probe microscopy data over mm2 regions. The system combines a slow moving but accurate large area XYZ scanner with a very fast but less accurate small area XY scanner. This arrangement enables very large areas to be scanned by stitching together the small, rapidly acquired, images from the fast XY scanner while simultaneously moving the slow XYZ scanner across the region of interest. In order to successfully merge the image sequences together two software approaches for calibrating the data from the fast scanner are described. The first utilizes the low uncertainty interferometric sensors of the XYZ scanner while the second implements a genetic algorithm with multiple parameter fitting during the data merging step of the image stitching process. The basic uncertainty components related to these high-speed measurements are also discussed. Both techniques are shown to successfully enable high- resolution, large area images to be generated at least an order of magnitude faster than with a conventional atomic force microscope. (en)
Title	Large area high-speed metrology SPM system Large area high-speed metrology SPM system (en)
skos:prefLabel	Large area high-speed metrology SPM system Large area high-speed metrology SPM system (en)
skos:notation	RIV/00177016:_____/15:#0001036!RIV15-MSM-00177016
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(7AX13020)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Valtr, Miroslav Klapetek, Petr Martinek, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	246
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/15:#0001036
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	scanning probe microscopy; high-speed SPM; metrology (en)
http://linked.open.../riv/klicoveSlovo	scanning probe microscopy high-speed SPM metrology
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[657783C0A5D3]
http://linked.open...i/riv/nazevZdroje	Nanotechnology
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Metrology for movement and positioning in six degrees of freedom
http://linked.open...UplatneniVysledku	2015
http://linked.open...v/svazekPeriodika	26
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Valtr, Miroslav Martinek, Jan Miles, Mervyn Payton, Oliver Picco, Loren Yacoot, Andrew
http://linked.open...ain/vavai/riv/wos	000348448000012
issn	0957-4484
number of pages	9 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/0957-4484/26/6/065501

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