About: Voice coil-based scanning probe microscopy

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.nanoscalereslett.com/content/7/1/332
Description	We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can be a good alternative to piezoceramic positioning systems, providing fast and still suﬃcient, precise displacements which range from nanometers to millimeters. Using fuzzy logic feedback control, it can be actuated even with only a few low-cost components, like a cheap single-chip microcontroller. As the ﬁnal positioning resolution can be made independent on the electronics output resolution, the system can reach high positioning resolution even on very large scan sizes. This is a key prerequisite for developing novel generations of SPMs that would combine, in a very large range, with high-speed imaging. We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can be a good alternative to piezoceramic positioning systems, providing fast and still suﬃcient, precise displacements which range from nanometers to millimeters. Using fuzzy logic feedback control, it can be actuated even with only a few low-cost components, like a cheap single-chip microcontroller. As the ﬁnal positioning resolution can be made independent on the electronics output resolution, the system can reach high positioning resolution even on very large scan sizes. This is a key prerequisite for developing novel generations of SPMs that would combine, in a very large range, with high-speed imaging. (en)
Title	Voice coil-based scanning probe microscopy Voice coil-based scanning probe microscopy (en)
skos:prefLabel	Voice coil-based scanning probe microscopy Voice coil-based scanning probe microscopy (en)
skos:notation	RIV/00177016:_____/12:#0000571!RIV13-MPO-00177016
http://linked.open...avai/predkladatel	Český metrologický institut
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(FR-TI1/241), P(KAN311610701)
http://linked.open...iv/cisloPeriodika	7
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Duchoň, Václav Valtr, Miroslav Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	178454
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/12:#0000571
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SPM; voice coil; interferometry (en)
http://linked.open.../riv/klicoveSlovo	voice coil interferometry SPM
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[FA98F009A3D4]
http://linked.open...i/riv/nazevZdroje	Nanoscale Research Letters
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Components for nano-diagnostic of length fluctuations, deviation of shapes and surface faults APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Nanometrology using methods of scanning probe microscopy
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	2012
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Sobota, Jaroslav Valtr, Miroslav Duchoň, Václav
issn	1556-276X
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1186/1556-276X-7-332
is http://linked.open...avai/riv/vysledek of	Voice coil-based scanning probe microscopy

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