About: Spectroscopic ellipsometry on sinusoidal surface-relief gratings

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass. The rigorous coupled-wave analysis, implemented as the airy-like internal reﬂection series, is applied to calculate the optical response of the relief grating. The entire optical response of the sample is determined by employing incoherent backreﬂections at the interface between the polymer and the glass. The parameters describing the dimensions and the real shape of the sine-like relief, as well as the quality of the optical matching between the polymer and the glass, are determined using SE together with atomic force microscopy as a complementary technique. Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass. The rigorous coupled-wave analysis, implemented as the airy-like internal reﬂection series, is applied to calculate the optical response of the relief grating. The entire optical response of the sample is determined by employing incoherent backreﬂections at the interface between the polymer and the glass. The parameters describing the dimensions and the real shape of the sine-like relief, as well as the quality of the optical matching between the polymer and the glass, are determined using SE together with atomic force microscopy as a complementary technique. (en)
Title	Spectroscopic ellipsometry on sinusoidal surface-relief gratings Spectroscopic ellipsometry on sinusoidal surface-relief gratings (en)
skos:prefLabel	Spectroscopic ellipsometry on sinusoidal surface-relief gratings Spectroscopic ellipsometry on sinusoidal surface-relief gratings (en)
skos:notation	RIV/00177016:_____/05:#0000329!RIV11-GA0-00177016
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/03/0776), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	01
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Klapetek, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Český metrologický institut
http://linked.open...dnocenehoVysledku	543908
http://linked.open...ai/riv/idVysledku	RIV/00177016:_____/05:#0000329
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	ellipsometry
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[916764B6C710]
http://linked.open...i/riv/nazevZdroje	Applied Surface Science
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Magneto-optical effects in magnetic nanostructures
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	244
http://linked.open...iv/tvurceVysledku	Klapetek, Petr Franta, D. Ohlídal, I. Mistřík, J. Yamaguchi, T. Antoš, R. Višnovský, S.
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	0169-4332
number of pages	4 (xsd:int)

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