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  • The design of the deposition apparatus and its vacuum components for plasma polymerization processes (en)
  • Návrh depoziční aparatury a jejích vakuových komponent pro plazmově polymerizační procesy
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  • The design of the deposition apparatus for plasma polymerization processes (en)
  • Návrh depoziční aparatury pro plazmově polymerizační procesy
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  • OC 527.30
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  • Plasma polymer, rf sputtering, thin film, vacuum systems, vacuum components (en)
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  • The modular deposition apparatus for plasma polymerisation processes has been designed. Also vacuum systems for sampling, sample transport and analysis have been realised. Publications: 2 scientific journals, 9 conference proceedings (en)
  • Byl proveden výpočet, návrh a realizace vakuové depoziční aparatury pro plazmově polymerizační . Navíc byly navrženy a realizovány vakuové systémy pro odběr, přenos a analýzu vzorků připravených plazmovou polymerizací. Publikace: 2 časopisy, 9 sborníky (cs)
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  • Plasma polymer
  • thin film
  • rf sputtering
  • vacuum systems
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