About: European 450mm Equipment Demo Line     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Projekt, within Data Space : linked.opendata.cz associated with source document(s)

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Description
  • The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules. (en)
  • The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules.
Title
  • European 450mm Equipment Demo Line (en)
  • European 450mm Equipment Demo Line
skos:notation
  • 7H13015
http://linked.open...avai/cep/aktivita
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http://linked.open.../cep/klicovaSlova
  • 450 mm technology; STEM; wafer metrology; electron optical simulations (en)
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  • STEM
  • wafer metrology
  • 450 mm technology
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