About: Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology     Goto   Sponge   NotDistinct   Permalink

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Description
  • This JRP aims to develop new types of standards in the nanometre and sub-nanometre range to trace back instruments to the SI unit of length with a small uncertainty of u(h) = 10 pm (for step height prototypes) and to reveal characteristics of the instruments (flatness). New techniques will be developed by using the nature of crystalline materials as well as by using a promising lithographic technique based on block co-polymers. Another aim for the JRP is the use of the nano-origami technique as a production technique to fabricate structures of nanoscale size. Whereas the first aim will go beyond the current limit of available standards i.e. below 6 nm for step height and below 100 nm for pitch standards, the latter aim and techniques will be useful to create geometrically well-defined nano-objects that are necessary for the future validation of such instruments (e.g. AFM for the dimensional measurements of 3D-nano-objects).
  • This JRP aims to develop new types of standards in the nanometre and sub-nanometre range to trace back instruments to the SI unit of length with a small uncertainty of u(h) = 10 pm (for step height prototypes) and to reveal characteristics of the instruments (flatness). New techniques will be developed by using the nature of crystalline materials as well as by using a promising lithographic technique based on block co-polymers. Another aim for the JRP is the use of the nano-origami technique as a production technique to fabricate structures of nanoscale size. Whereas the first aim will go beyond the current limit of available standards i.e. below 6 nm for step height and below 100 nm for pitch standards, the latter aim and techniques will be useful to create geometrically well-defined nano-objects that are necessary for the future validation of such instruments (e.g. AFM for the dimensional measurements of 3D-nano-objects). (en)
Title
  • Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology
  • Crystalline surfaces, self assembled structures, and nano-origami as length standards in (nano)metrology (en)
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  • 7AX13032
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  • nano metrology (en)
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