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About:
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
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http://linked.opendata.cz/ontology/domain/vavai/Vysledek
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linked.opendata.cz
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http://linked.opendata.cz/ontology/domain/vavai/Vysledek
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http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description
The paper deals with local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates
The paper deals with local donor doping by proton implantation in p+nn+ diodes fabricated on different silicon substrates
(en)
Title
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
(en)
skos:prefLabel
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
(en)
skos:notation
RIV/68407700:21230/08:00145356!RIV10-MSM-21230___
http://linked.open...avai/riv/aktivita
P
http://linked.open...avai/riv/aktivity
P(GP102/08/P488), P(LC06041)
http://linked.open...vai/riv/dodaniDat
2010
http://linked.open...aciTvurceVysledku
Hazdra, Pavel
Komarnitskyy, Volodymyr
http://linked.open.../riv/druhVysledku
D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju
S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele
České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku
377000
http://linked.open...ai/riv/idVysledku
RIV/68407700:21230/08:00145356
http://linked.open...riv/jazykVysledku
eng - angličtina
http://linked.open.../riv/klicovaSlova
implantation; lifetime control; protons; silicon; thermal donors
(en)
http://linked.open.../riv/klicoveSlovo
protons
silicon
implantation
lifetime control
thermal donors
http://linked.open...ontrolniKodProRIV
[A5916EFBAE41]
http://linked.open...v/mistoKonaniAkce
Praha
http://linked.open...i/riv/mistoVydani
Praha
http://linked.open...i/riv/nazevZdroje
ISPS 08 Proceedings
http://linked.open...in/vavai/riv/obor
JA
http://linked.open...ichTvurcuVysledku
2
(
xsd:int
)
http://linked.open...cetTvurcuVysledku
2
(
xsd:int
)
http://linked.open...vavai/riv/projekt
Preparation, modification and characterization of materials by energetic radiation.
Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology.
http://linked.open...UplatneniVysledku
2008
http://linked.open...iv/tvurceVysledku
Hazdra, Pavel
Komarnitskyy, Volodymyr
http://linked.open...vavai/riv/typAkce
EUR - Evropská
http://linked.open.../riv/zahajeniAkce
2008-08-27
(
xsd:date
)
number of pages
6
(
xsd:int
)
http://purl.org/ne...btex#hasPublisher
České vysoké učení technické v Praze
https://schema.org/isbn
978-80-01-04139-0
http://localhost/t...ganizacniJednotka
21230
is
http://linked.open...avai/riv/vysledek
of
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
Local Donor Doping by Proton Implantation in p+nn+ Diodes Fabricated on Different Silicon Substrates
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