About: Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this article, atomic force microscopy method was used for diagnostics of ultra-thin tungsten films which were deposited on silicon substrate. Radio frequency magnetron sputtering method was used for tungsten deposition on the surface. According to atomic forces between the tip and the sample, topographical structures were measured and imaged. In this article, atomic force microscopy method was used for diagnostics of ultra-thin tungsten films which were deposited on silicon substrate. Radio frequency magnetron sputtering method was used for tungsten deposition on the surface. According to atomic forces between the tip and the sample, topographical structures were measured and imaged. (en)
Title	Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy (en)
skos:prefLabel	Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy (en)
skos:notation	RIV/70883521:28140/14:43871862!RIV15-MSM-28140___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0089)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Hruška, František Křesálek, Vojtěch Navrátil, Milan Martínek, Tomáš Kudělka, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Tomáše Bati ve Zlíně / Fakulta aplikované informatiky
http://linked.open...dnocenehoVysledku	11172
http://linked.open...ai/riv/idVysledku	RIV/70883521:28140/14:43871862
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	atomic force microscopy; tungsten; silicon; ultra-thin films (en)
http://linked.open.../riv/klicoveSlovo	silicon atomic force microscopy tungsten ultra-thin films
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[ECA48C077F40]
http://linked.open...i/riv/nazevZdroje	International Journal of Materials
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	The Centre of Security, Information and Advanced Technologies (CEBIA-Tech)
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	2014
http://linked.open...iv/tvurceVysledku	Hruška, František Martínek, Tomáš Navrátil, Milan Sobota, Jaroslav Křesálek, Vojtěch Kudělka, Josef
issn	2313-0555
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	28140

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