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Description
  • Je zkoumána plazmochemie methylphenylsilanu zředěného vodíkem v radiofrekvenčních výbojích při depozici tenkých vrstev plazmatických polysilanů. Reakční systém byl studován za podmínek vedoucích k nejlepším materiálům za podmínek identifikovanžch v dřívějších studiích. MS je využita ke sledování fragmentace monomeru a k přímé dynamické i statické chrakterizaci výboje. Je popsán efekt příkonu buzení plazmatu. Produkty plazmaticky indukované reakce se sbíraly do kryogenní pasti a následně byly separovány pomocí GC MS. Byly identifikovány organicko-křemíkové prekurzory plazmatické polymerizace jednodimenzionálních polysilanů. Byla zavedena jednoduchá metoda stanovení konverze monomeru. (cs)
  • The plasmochemistry of methylphenylsilane diluted with hydrogen in radio frequency discharges during the deposition of thin films of plasmatic polysilane is investigated. The plasma reaction system has been examined under conditions identified from previous studies to give the best material. Mass spectrometry is used to follow the monomer fragmentation and to directly (on-line) analyze the plasma composition under the static and dynamic regimes. The effect of input power is described. The products of the plasma-induced reactions are collected in a cryogenic trap and then separated and analyzed by gas chromatography with a mass spectrometry analyzer. Organosilicon precursors for the plasma polymerization of one-dimensional polysilanes are identified together with prevailing reaction pathways in the plasma. A simple method of monomer conversion efficiency is introduced.
  • The plasmochemistry of methylphenylsilane diluted with hydrogen in radio frequency discharges during the deposition of thin films of plasmatic polysilane is investigated. The plasma reaction system has been examined under conditions identified from previous studies to give the best material. Mass spectrometry is used to follow the monomer fragmentation and to directly (on-line) analyze the plasma composition under the static and dynamic regimes. The effect of input power is described. The products of the plasma-induced reactions are collected in a cryogenic trap and then separated and analyzed by gas chromatography with a mass spectrometry analyzer. Organosilicon precursors for the plasma polymerization of one-dimensional polysilanes are identified together with prevailing reaction pathways in the plasma. A simple method of monomer conversion efficiency is introduced. (en)
Title
  • Mass spectrometry characterization of methylphenylsilane-hydrogen RF plasmas
  • Charakterizace methylphenylsilan-vodíkových RF plazmatu pomocí hmotnostní spektrometrie (cs)
  • Mass spectrometry characterization of methylphenylsilane-hydrogen RF plasmas (en)
skos:prefLabel
  • Mass spectrometry characterization of methylphenylsilane-hydrogen RF plasmas
  • Charakterizace methylphenylsilan-vodíkových RF plazmatu pomocí hmotnostní spektrometrie (cs)
  • Mass spectrometry characterization of methylphenylsilane-hydrogen RF plasmas (en)
skos:notation
  • RIV/70883521:28110/07:63505347!RIV08-AV0-28110___
http://linked.open.../vavai/riv/strany
  • 53-61
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA100100622), Z(MSM7088352101)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 432205
http://linked.open...ai/riv/idVysledku
  • RIV/70883521:28110/07:63505347
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • cryogenic sampling; gas chromatography; mass spectrometry; organo-silicon precursors; radio frequency glow discharge (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [EF6D70355825]
http://linked.open...i/riv/nazevZdroje
  • Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 4
http://linked.open...iv/tvurceVysledku
  • Kuřitka, Ivo
  • Schauer, František
  • Broža, Pavel
  • Pryček, Jiří
http://linked.open...n/vavai/riv/zamer
issn
  • 1612-8850
number of pages
http://localhost/t...ganizacniJednotka
  • 28110
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