About: Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope

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About: Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://link.springer.com/content/pdf/10.1007%2Fs00340-012-5125-3
Description	Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-puff target and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional optical microscopy or SEM. Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-puff target and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional optical microscopy or SEM. (en)
Title	Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope (en)
skos:prefLabel	Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope (en)
skos:notation	RIV/68407700:21460/12:00196864!RIV13-AV0-21460___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(KAN300100702)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Pánek, Dalibor Brůža, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta biomedicínského inženýrství
http://linked.open...dnocenehoVysledku	140514
http://linked.open...ai/riv/idVysledku	RIV/68407700:21460/12:00196864
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	EUV; laser-produced plasma; fresnel zone plate; microscopy (en)
http://linked.open.../riv/klicoveSlovo	microscopy EUV laser-produced plasma fresnel zone plate
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[480679424958]
http://linked.open...i/riv/nazevZdroje	Applied Physics B: Lasers and Optics
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Creating and probing nanostructures with X-ray lasers
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	109
http://linked.open...iv/tvurceVysledku	Brůža, Petr Pánek, Dalibor Bartnik, A. Fiedorowicz, H. Wachulak, P. W.
http://linked.open...ain/vavai/riv/wos	000310743700016
issn	0946-2171
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1007/s00340-012-5125-3
http://localhost/t...ganizacniJednotka	21460

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