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  • Lithium niobate (LiNbO3) is a material widely used in many technical applications. Films were studied for the development of doped planar waveguides. The films were deposited by Pulsed Laser Deposition method on SiO2/Si and (0001) sapphire substrates at temperatures 650°C, 700°C, 750°C, from one crystalline and two sintered LiNbO3 targets using KrF excimer laser. The crystalline phase of all prepared samples was verified by X-ray Diffraction method. Fourier Transform Infrared Spectroscopy and micro Raman Spectroscopy were used to characterize the dependence of the deposited films properties on the deposition conditions. These methods characterize the materials by monitoring their phonons whose spectra are sensitive to the film deposition parameters. Heat exposure leads to an increase in crystalline content, which can be determined by polarized spectra. Bulk LiNbO3 has rhombohedral crystal structure R3c (C3v6) with two chemical units per primitive cell, it means, that 30 degrees of freedom are distributed between A1 and E irreducible representations. The precise assignment of phonon modes in thin films, however, has not been unambiguously established. We can conclude that our films are polycrystalline materials in rhombohedral phase.
  • Lithium niobate (LiNbO3) is a material widely used in many technical applications. Films were studied for the development of doped planar waveguides. The films were deposited by Pulsed Laser Deposition method on SiO2/Si and (0001) sapphire substrates at temperatures 650°C, 700°C, 750°C, from one crystalline and two sintered LiNbO3 targets using KrF excimer laser. The crystalline phase of all prepared samples was verified by X-ray Diffraction method. Fourier Transform Infrared Spectroscopy and micro Raman Spectroscopy were used to characterize the dependence of the deposited films properties on the deposition conditions. These methods characterize the materials by monitoring their phonons whose spectra are sensitive to the film deposition parameters. Heat exposure leads to an increase in crystalline content, which can be determined by polarized spectra. Bulk LiNbO3 has rhombohedral crystal structure R3c (C3v6) with two chemical units per primitive cell, it means, that 30 degrees of freedom are distributed between A1 and E irreducible representations. The precise assignment of phonon modes in thin films, however, has not been unambiguously established. We can conclude that our films are polycrystalline materials in rhombohedral phase. (en)
Title
  • Characterization of LiNbO3 thin films using infrared and Raman spectroscopy
  • Characterization of LiNbO3 thin films using infrared and Raman spectroscopy (en)
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  • Characterization of LiNbO3 thin films using infrared and Raman spectroscopy
  • Characterization of LiNbO3 thin films using infrared and Raman spectroscopy (en)
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  • RIV/68407700:21460/12:00193290!RIV13-MSM-21460___
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  • RIV/68407700:21460/12:00193290
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  • LiNbO3; thin films; FTIR; Raman spectroscopy (en)
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  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Zezulová, Markéta
  • Železný, V.
  • Vorlíček, V.
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  • 21460
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