About: Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated. TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated. (en) Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
Title	Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application (en) Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
skos:prefLabel	Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application (en) Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
skos:notation	RIV/68407700:21460/06:12117676!RIV08-MSM-21460___
http://linked.open.../vavai/riv/strany	503;507
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6840770012)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Jelínek, Miroslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta biomedicínského inženýrství
http://linked.open...dnocenehoVysledku	478463
http://linked.open...ai/riv/idVysledku	RIV/68407700:21460/06:12117676
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Nanocomposite Films; inductively coupled plasma (en)
http://linked.open.../riv/klicoveSlovo	inductively coupled plasma Nanocomposite Films
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[783BA31150D7]
http://linked.open...i/riv/nazevZdroje	Applied Physics A: Materials Science and Processing
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	82
http://linked.open...iv/tvurceVysledku	Jelínek, Miroslav Rossi, F. Ceccone, G. Kulisch, W. Colpo, P. Gipson, P. N. Levashov, E. A. Philip, P. J. M. Shtansky, D. V.
http://linked.open...n/vavai/riv/zamer	Transdisciplinární výzkum v oblasti biomedicínského inženýrství II
issn	0947-8396
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	21460

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