About: Structuring of diamond films using microsphere lithography

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	https://ojs.cvut.cz/ojs/index.php/ap/article/view/AP.2014.54.0320/2175
Description	In this study, the structuring of micro-and nanocrystalline diamond thin films is demonstrated. The diamond films are structured using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma using various plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of the processed diamond films is characterized by scanning electron microscopy and with the use of an atomic force microscope. The potential applications of these diamond structures in various fields of nanotechnology are also briefly discussed. In this study, the structuring of micro-and nanocrystalline diamond thin films is demonstrated. The diamond films are structured using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma using various plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of the processed diamond films is characterized by scanning electron microscopy and with the use of an atomic force microscope. The potential applications of these diamond structures in various fields of nanotechnology are also briefly discussed. (en)
Title	Structuring of diamond films using microsphere lithography Structuring of diamond films using microsphere lithography (en)
skos:prefLabel	Structuring of diamond films using microsphere lithography Structuring of diamond films using microsphere lithography (en)
skos:notation	RIV/68407700:21340/14:00223276!RIV15-MSM-21340___
http://linked.open...avai/riv/aktivita	I P S
http://linked.open...avai/riv/aktivity	I, P(GBP108/12/G108), S
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Proška, Jan Štolcová, Lucie
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	47959
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/14:00223276
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Diamond thin films; Nanostructuring; Polystyrene microspheres; Reactive ion etching; Scanning electron microscopy (en)
http://linked.open.../riv/klicoveSlovo	Nanostructuring Diamond thin films Polystyrene microspheres Reactive ion etching Scanning electron microscopy
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[C814D9EAC980]
http://linked.open...i/riv/nazevZdroje	Acta Polytechnica
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	54
http://linked.open...iv/tvurceVysledku	Demo, Pavel Proška, Jan Kromka, A. Štolcová, Lucie Domonkos, Mária Ižák, T.
issn	1210-2709
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.14311/AP.2014.54.0320
http://localhost/t...ganizacniJednotka	21340

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