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| Description
| - Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with assistance of EBL or FIB techniques. However, EBL/FIB techniques are expensive and time consuming; especially for processing large areas. Nanosphere lithography offers an economically acceptable alternative. Here we present a technology which allows a fabrication of periodically ordered diamond nano-structures over large areas. The technological process starts with the deposition of polystyrene spheres (PS) monolayer (spheres 250 or 471 nm) on seeded quartz or Si substrates by Langmuir-Blodgett method. The self-assembled PS are employed as a mask for reactive ion etching (RIE) used for reducing a PS diameter to 100 and 200 nm, respectively. The processed substrates are finally used for growing arrays of ordered diamond nano-structures. The geometry of formed arrays is controlled by PS diameter (100-1500 nm) and RIE parameters. The presented technology is simple and cheap, and allows a preparation of periodically ordered diamond hollows. This work was supported by the grants P108/12/G108 and P205/13/20110S.
- Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with assistance of EBL or FIB techniques. However, EBL/FIB techniques are expensive and time consuming; especially for processing large areas. Nanosphere lithography offers an economically acceptable alternative. Here we present a technology which allows a fabrication of periodically ordered diamond nano-structures over large areas. The technological process starts with the deposition of polystyrene spheres (PS) monolayer (spheres 250 or 471 nm) on seeded quartz or Si substrates by Langmuir-Blodgett method. The self-assembled PS are employed as a mask for reactive ion etching (RIE) used for reducing a PS diameter to 100 and 200 nm, respectively. The processed substrates are finally used for growing arrays of ordered diamond nano-structures. The geometry of formed arrays is controlled by PS diameter (100-1500 nm) and RIE parameters. The presented technology is simple and cheap, and allows a preparation of periodically ordered diamond hollows. This work was supported by the grants P108/12/G108 and P205/13/20110S. (en)
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| Title
| - Fabrication of periodically ordered diamond nano-structures by nanosphere lithography
- Fabrication of periodically ordered diamond nano-structures by nanosphere lithography (en)
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| skos:prefLabel
| - Fabrication of periodically ordered diamond nano-structures by nanosphere lithography
- Fabrication of periodically ordered diamond nano-structures by nanosphere lithography (en)
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| skos:notation
| - RIV/68407700:21340/14:00218871!RIV15-GA0-21340___
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/68407700:21340/14:00218871
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - reactive ion etching; RIE; sensors; nanodiamond (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
| - Proška, Jan
- Kromka, A.
- Štolcová, Lucie
- Domonkos, Mária
- Ižák, T.
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| http://localhost/t...ganizacniJednotka
| |
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