About: Etching Effects of Low Temperature Hydrogen Plasma on Encapsulated Diamond Transistors     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • We study etching effects of low temperature hydrogen plasma treatment (200-300°C) in two different microwave plasma reactors (linear and focused plasma) on diamond solution-gated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20um) are grown from nanocrystalline H-terminated intrinsic diamond by MW-CVD on Si/SiO2 substrates.
  • We study etching effects of low temperature hydrogen plasma treatment (200-300°C) in two different microwave plasma reactors (linear and focused plasma) on diamond solution-gated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20um) are grown from nanocrystalline H-terminated intrinsic diamond by MW-CVD on Si/SiO2 substrates. (en)
Title
  • Etching Effects of Low Temperature Hydrogen Plasma on Encapsulated Diamond Transistors
  • Etching Effects of Low Temperature Hydrogen Plasma on Encapsulated Diamond Transistors (en)
skos:prefLabel
  • Etching Effects of Low Temperature Hydrogen Plasma on Encapsulated Diamond Transistors
  • Etching Effects of Low Temperature Hydrogen Plasma on Encapsulated Diamond Transistors (en)
skos:notation
  • RIV/68407700:21340/12:00200580!RIV13-MSM-21340___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Neykova, Neda
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 134834
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21340/12:00200580
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Nanodiamonf; FET; microwave plasma; low temperature (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8FD7357F3A13]
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kromka, A.
  • Neykova, Neda
  • Krátká, M.
http://localhost/t...ganizacniJednotka
  • 21340
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software