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Description
  • Předmětem této práce je studium parametrů plazmatu bariérového pochodňového výboje optickou emisní spektroskopií během depozice tenkých vrstev oxidu titaničitého. Elektronová hustota plazmatu byla určena z délky rozšíření tzv. Hbeta čáry. (cs)
  • Barrier torch discharge at atmospheric pressure is a relatively new plasma deposition system capable of working at atmospheric pressure in the open air. Barrier torch discharge is used for deposition of ZnO and TiO2 layers. In this paper we present the qualitative analysis of the emission spectra of the barrier torch discharge during deposition. The first results of spectroscopic measurements of Balme Hbeta line width aimed at estimating the electron density in plasma jet at atmospheric pressure are presented as well. Electron concentration was estimated at special conditions (DC plasma jet with Ar as working gas).
  • Barrier torch discharge at atmospheric pressure is a relatively new plasma deposition system capable of working at atmospheric pressure in the open air. Barrier torch discharge is used for deposition of ZnO and TiO2 layers. In this paper we present the qualitative analysis of the emission spectra of the barrier torch discharge during deposition. The first results of spectroscopic measurements of Balme Hbeta line width aimed at estimating the electron density in plasma jet at atmospheric pressure are presented as well. Electron concentration was estimated at special conditions (DC plasma jet with Ar as working gas). (en)
Title
  • Optical Emission Spectrocopy of the Barrier Torch Discharge
  • Optická emisní spektroskopie bariérového pochodňového výboje (cs)
  • Optical Emission Spectrocopy of the Barrier Torch Discharge (en)
skos:prefLabel
  • Optical Emission Spectrocopy of the Barrier Torch Discharge
  • Optická emisní spektroskopie bariérového pochodňového výboje (cs)
  • Optical Emission Spectrocopy of the Barrier Torch Discharge (en)
skos:notation
  • RIV/68407700:21340/07:04138931!RIV08-MSM-21340___
http://linked.open.../vavai/riv/strany
  • 1090;1093
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770021)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 439679
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21340/07:04138931
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Atmospheric Pressure Barrier Torch Discharge,Optical Emission Spectroscopy,Thin films,Plasma; PECVD (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [DADB6F984906]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha 8
http://linked.open...i/riv/nazevZdroje
  • XXVIII International Conference on Phenomena in Ionized Gases
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kment, Štěpán
  • Tichý, M.
  • Hubička, Z.
  • Churpita, O.
  • Chichina, M.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ústav fyziky plazmatu AV ČR
https://schema.org/isbn
  • 978-80-87026-01-4
http://localhost/t...ganizacniJednotka
  • 21340
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