About: Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Results on micro- and nanoprocessing of organic polymers using X-rays and extreme ultraviolet (EUV) generated from laser-plasma radiation sources are presented in the paper. The sources used in the studies are based on the gas puff target approach developed at the Institute of Optoelectronics, Warsaw. Processing of polymers is connected with non-thermal ablation under the influence of energetic photons of X-ray and EUV radiation. The process can be useful for practical applications as it makes possible to produce structures with sub-micron spatial resolution that is not possible using the thermal ablation. The new technology will be used for production of photonic microstructures and for modification of polymer surfaces for biomedical applications. Results on micro- and nanoprocessing of organic polymers using X-rays and extreme ultraviolet (EUV) generated from laser-plasma radiation sources are presented in the paper. The sources used in the studies are based on the gas puff target approach developed at the Institute of Optoelectronics, Warsaw. Processing of polymers is connected with non-thermal ablation under the influence of energetic photons of X-ray and EUV radiation. The process can be useful for practical applications as it makes possible to produce structures with sub-micron spatial resolution that is not possible using the thermal ablation. The new technology will be used for production of photonic microstructures and for modification of polymer surfaces for biomedical applications. (en) V práci jsou prezentovány výsledky působení EUV záření ze zdrojů na bázi laserového plasmatu na organické materiály a jejich využití pro mikro a nano technologie. (cs)
Title	Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology (en) Aplikace rtg. a EUV záření ze zdrojů na bázi laserového plasmatu v mikro- a nanotechnologii (cs)
skos:prefLabel	Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology Application of laser plasma soft x-ray and EUV sources in micro- and nanotechnology (en) Aplikace rtg. a EUV záření ze zdrojů na bázi laserového plasmatu v mikro- a nanotechnologii (cs)
skos:notation	RIV/68407700:21340/07:04137471!RIV08-MSM-21340___
http://linked.open.../vavai/riv/strany	65980G;65980G
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1P04LA235), P(KAN300100702), P(LC510), P(LC528), Z(AV0Z10100523), Z(MSM6840770022)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Pína, Ladislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	410477
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/07:04137471
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	EUV radiation; Laser plasma source; Lobster eye; nanotechnology (en)
http://linked.open.../riv/klicoveSlovo	nanotechnology EUV radiation Lobster eye Laser plasma source
http://linked.open...ontrolniKodProRIV	[9F87CE53863C]
http://linked.open...v/mistoKonaniAkce	Szczecin-Świnoujście
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Laser Technology VIII: Applications of Lasers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Research in frame of the International Center for Dense Magnetized Plasma Creating and probing nanostructures with X-ray lasers Centre of Laser Plasma
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Juha, L. Pína, Ladislav Bartnik, A. Fiedorowicz, H. Jarocki, R. Kostecki, J. Szczurek, M. Jakubczak, K. Rakowski, R.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2006-09-25 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Intense Radiation Sources and Radiation-Matter Interaction Laserové systémy, záření a moderní optické aplikace
number of pages	8 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-6734-8
http://localhost/t...ganizacniJednotka	21340

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