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  • Zkoumali jsme deposici mikrokrystalického křemíku mikrovlnnou technikou PECVD. MWPECVD je vynikající prostředek ke zprostředkování rychlé depozice křemíku při nízkých teplotách, nicméně, tento rychlý růst je často doprovázen vysokou porositou. Za účelem dosažení celistvosti křemíkových vrstev jsme zkoumali parametry prostoru rozsáhlé depozice. (cs)
  • We investigated the deposition of c-Si by microwave PECVD. MWPECVD is an excellent tool for fast deposition of silicon at low temperatures, however, this fast growth is often accompanied with high porosity. In order to obtain dense Si layers we investigated a large deposition parameter space.
  • We investigated the deposition of c-Si by microwave PECVD. MWPECVD is an excellent tool for fast deposition of silicon at low temperatures, however, this fast growth is often accompanied with high porosity. In order to obtain dense Si layers we investigated a large deposition parameter space. (en)
Title
  • Optical and Structural Properties of Microcrystalline Silicon, Grown by Microwave PECVD
  • Optical and Structural Properties of Microcrystalline Silicon, Grown by Microwave PECVD (en)
  • Optické a strukturní vlastnosti mikrokrystalického křemíku, vyrobeného mikrovlnnou PECVD (cs)
skos:prefLabel
  • Optical and Structural Properties of Microcrystalline Silicon, Grown by Microwave PECVD
  • Optical and Structural Properties of Microcrystalline Silicon, Grown by Microwave PECVD (en)
  • Optické a strukturní vlastnosti mikrokrystalického křemíku, vyrobeného mikrovlnnou PECVD (cs)
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  • RIV/68407700:21340/05:04116669!RIV06-MSM-21340___
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  • RIV/68407700:21340/05:04116669
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  • Micro crystalline Silicon PECVD Optical Properties (en)
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  • [8A9144E3A633]
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  • Poruba, A.
  • Hoďáková, Lenka
  • Vanecek, M.
  • Bierbericher, A.
  • Burgers, A.
  • Devilee, G.
  • Muffler, H.
  • Soppe, W.
http://linked.open...n/vavai/riv/zamer
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  • 3-936338-19-1
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  • 21340
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