About: Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge

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About: Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Barrier torch discharge was used for low temperature deposition of InxOy and SnOx thin films at atmospheric pressure on polymer substrates. Vapors of Sn- and In-acetylacetonat were used as growth precursors for the deposition process of SnOx and InxOy thin films. Transparent films of conductivity ?SnO?10 S/cm for SnOx and ?InO?102 S/cm for InxOy were deposited on polymer substrates under conditions when the atmospheric plasma jet directly interacted with the polymer substrate. Plasma jet excitation had to be pulse modulated in order to avoid thermal damages of the polymer substrate. SnOx and InxOy were also deposited in a different discharge mode, in which interaction of the light emitting plasma jet with the substrate did not directly occur. In this case, the films had pure adhesion and had electrical conductivity lower than ?<10-3 S/cm. The analysis by an electron microprobe system has shown that the films had chemical composition close to SnO2 and In2O3, respectively. Barrier torch discharge was used for low temperature deposition of InxOy and SnOx thin films at atmospheric pressure on polymer substrates. Vapors of Sn- and In-acetylacetonat were used as growth precursors for the deposition process of SnOx and InxOy thin films. Transparent films of conductivity ?SnO?10 S/cm for SnOx and ?InO?102 S/cm for InxOy were deposited on polymer substrates under conditions when the atmospheric plasma jet directly interacted with the polymer substrate. Plasma jet excitation had to be pulse modulated in order to avoid thermal damages of the polymer substrate. SnOx and InxOy were also deposited in a different discharge mode, in which interaction of the light emitting plasma jet with the substrate did not directly occur. In this case, the films had pure adhesion and had electrical conductivity lower than ?<10-3 S/cm. The analysis by an electron microprobe system has shown that the films had chemical composition close to SnO2 and In2O3, respectively. (en)
Title	Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge (en)
skos:prefLabel	Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge Deposition of InxOy and SnOx thin films on polymer substrate by means of atmospheric barrier-torch discharge (en)
skos:notation	RIV/68407700:21340/03:04092465!RIV/2004/MSM/213404/N
http://linked.open.../vavai/riv/strany	1059 ; 1063
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IBS1010203), P(LN00A015), P(OC 527.70), Z(AV0Z1010914), Z(AV0Z1010921), Z(MSM 113200002), Z(MSM 210000022)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Ptáček, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	603097
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/03:04092465
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Atmospheric barrier-torch; InxOy and SnOx; Thin films; Electrical conductivity; Low temperature (en)
http://linked.open.../riv/klicoveSlovo	Thin films Atmospheric barrier-torch InxOy and SnOx Electrical conductivity Low temperature
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[9E5335EA927B]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Research center for optics http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.70 New low temperature plasmatic technologies of thin films deposition at atmospheric pressure
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	174-175
http://linked.open...iv/tvurceVysledku	Jastrabík, L. Ptáček, Pavel Chvostová, D. Soukup, L. Hubička, Z. Čada, M. Churpita, A.
http://linked.open...n/vavai/riv/zamer	Experimentální a teoretický výzkum kondenzovaných systémů s význačnými fyzikálními vlastnostmi Výzkum vlastností ionizovaných prostředí a studium nelineárních a kvantových optických systémů http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20113200002 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20210000022
issn	0257-8972
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	21340

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