About: Investigation of the RF plasma jet system for deposition of LiCoOx thin films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The RF plasma jet system was investigated as a source for the sputtered deposition of LiCoOx thin films. As preliminary results of experiments, LiCoOx films with hexagonal high temperature structure were deposited. The RF hollow cathode in the shape of the cylindrical nozzle was sintered from powder of LiCoO2. This hollow cathode was reactively sputtered in Ar+O2. Plasma jet parameters were investigated during the sputtering process by a Langmuir probe system in the position of the substrate. The electron energy distribution function (EEDF) deviated from the Maxwellian distribution mainly in the energetic range below 5 eV. For higher energies above this value, the EEDF could be approximated with a Maxwellian fit in the limited interval of energies. Obtained electron concentrations were in the range ne=109-6x1010 cm-3 and were strongly dependent on the magnitude of the applied RF power PRF. The RF plasma jet system was investigated as a source for the sputtered deposition of LiCoOx thin films. As preliminary results of experiments, LiCoOx films with hexagonal high temperature structure were deposited. The RF hollow cathode in the shape of the cylindrical nozzle was sintered from powder of LiCoO2. This hollow cathode was reactively sputtered in Ar+O2. Plasma jet parameters were investigated during the sputtering process by a Langmuir probe system in the position of the substrate. The electron energy distribution function (EEDF) deviated from the Maxwellian distribution mainly in the energetic range below 5 eV. For higher energies above this value, the EEDF could be approximated with a Maxwellian fit in the limited interval of energies. Obtained electron concentrations were in the range ne=109-6x1010 cm-3 and were strongly dependent on the magnitude of the applied RF power PRF. (en)
Title	Investigation of the RF plasma jet system for deposition of LiCoOx thin films Investigation of the RF plasma jet system for deposition of LiCoOx thin films (en)
skos:prefLabel	Investigation of the RF plasma jet system for deposition of LiCoOx thin films Investigation of the RF plasma jet system for deposition of LiCoOx thin films (en)
skos:notation	RIV/68407700:21340/03:04092463!RIV/2004/MSM/213404/N
http://linked.open.../vavai/riv/strany	632 ; 637
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/02/P021), P(LN00A015), P(OC 527.70), Z(AV0Z1010914), Z(AV0Z1010921), Z(AV0Z4032918), Z(MSM 113200002), Z(MSM 210000021)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Ptáček, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	611183
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/03:04092463
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Plasma jet; LiCoO2 thin films; Langmuir probe; RF hollow cathode (en)
http://linked.open.../riv/klicoveSlovo	Langmuir probe Plasma jet LiCoO2 thin films RF hollow cathode
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[9CB3757FEF0D]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Research center for optics http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.70 Investigation of physical properties and applications of the low pressure plasma-chemical reactor with the system plasma jet channels for thin films deposition
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	174-175
http://linked.open...iv/tvurceVysledku	Jastrabík, L. Ptáček, Pavel Bludská, J. Hubička, Z. Jakubec, I. Přidal, J. Málková, Z. Trunda, B. Čada, N.
http://linked.open...n/vavai/riv/zamer	Synthesis and structure of novel (inorganic) compounds, clusters and composites; mechanisms of conversion and transfer in systems involving inorganic substance Experimentální a teoretický výzkum kondenzovaných systémů s význačnými fyzikálními vlastnostmi Výzkum vlastností ionizovaných prostředí a studium nelineárních a kvantových optických systémů http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20113200002 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20210000021
issn	0257-8972
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	21340

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