About: Detection of residual molybdenum impurity in CVD diamond

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About: Detection of residual molybdenum impurity in CVD diamond Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR (en)
Title	Detection of residual molybdenum impurity in CVD diamond Detection of residual molybdenum impurity in CVD diamond (en)
skos:prefLabel	Detection of residual molybdenum impurity in CVD diamond Detection of residual molybdenum impurity in CVD diamond (en)
skos:notation	RIV/68407700:21340/03:04092443!RIV/2004/MSM/213404/N
http://linked.open.../vavai/riv/strany	108 ; 112
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/02/0218), P(KSK1010104), Z(AV0Z1010914), Z(AV0Z1048901), Z(MSM 210000021)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Kravets, Roman
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	603289
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/03:04092443
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	CVD,Diamond,Raman Scattering,XPS (en)
http://linked.open.../riv/klicoveSlovo	Raman Scattering XPS Diamond CVD
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[FFB7C8EF8C39]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Condensed matter physics and materials science MW PE chemical vapour deposition of diamond layers and study of electronic and biofunctional surface properties
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	199
http://linked.open...iv/tvurceVysledku	Kromka, A. Peřina, V. Poruba, A. Rosa, J. Zemek, J. Vaněček, M. Kravets, Roman
http://linked.open...n/vavai/riv/zamer	Theoretical and experimental investigation of atomic nuclei and exploitation of nuclear methods in interdisciplinary research Experimentální a teoretický výzkum kondenzovaných systémů s význačnými fyzikálními vlastnostmi http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20210000021
issn	0031-8965
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	21340

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