About: Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering     Goto   Sponge   NotDistinct   Permalink

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Description
  • Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively, and their electrical and optical properties were evaluated with respect to the structure.
  • Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively, and their electrical and optical properties were evaluated with respect to the structure. (en)
  • Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem byly nalyzovány s ohledem na jejich strukturu. (cs)
Title
  • Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering
  • Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem (cs)
  • Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering (en)
skos:prefLabel
  • Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering
  • Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem (cs)
  • Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering (en)
skos:notation
  • RIV/68407700:21260/07:06139519!RIV08-MSM-21260___
http://linked.open.../vavai/riv/strany
  • 69;75
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770038)
http://linked.open...iv/cisloPeriodika
  • S1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 439668
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21260/07:06139519
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • electrical properties; optical properties; oxinitrides; sputtering; structural characterization (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [2F3ACD91ED7A]
http://linked.open...i/riv/nazevZdroje
  • Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 4
http://linked.open...iv/tvurceVysledku
  • Cavaleiro, A.
  • Martin, N.
  • Polcar, Tomáš
  • Parreira, N. M. G.
  • Banakh, O.
http://linked.open...n/vavai/riv/zamer
issn
  • 1612-8850
number of pages
http://localhost/t...ganizacniJednotka
  • 21260
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