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  • This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modeled as three-dimensional silicon based MEMS. With innovative approach we reached a very low resonant frequency of the structure (about 100Hz.) The modified long cantilever spring design with minimum area of the chip, its ability to work in 3D mode, and the ability to be tuned to reach desired parameters, proves promising directions of possible further development.
  • This paper discusses the characterization and evaluation of an MEMS based electrostatic generator, a part of the power supply unit of the self-powered microsystem. The designed generator is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modeled as three-dimensional silicon based MEMS. With innovative approach we reached a very low resonant frequency of the structure (about 100Hz.) The modified long cantilever spring design with minimum area of the chip, its ability to work in 3D mode, and the ability to be tuned to reach desired parameters, proves promising directions of possible further development. (en)
Title
  • Evaluating the 3D Energy Harvester
  • Evaluating the 3D Energy Harvester (en)
skos:prefLabel
  • Evaluating the 3D Energy Harvester
  • Evaluating the 3D Energy Harvester (en)
skos:notation
  • RIV/68407700:21230/13:00206152!RIV14-MV0-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(VG20102015015)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 73525
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/13:00206152
http://linked.open...riv/jazykVysledku
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  • MEMS; energy harvesting; evaluation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BD4078FE0558]
http://linked.open...v/mistoKonaniAkce
  • Brno
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  • Brno
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  • Proceedings - Electronic Devices and Systems - EDS '13
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  • Husák, Miroslav
  • Janíček, Vladimír
  • Formánek, Jan
  • Jakovenko, Jiří
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
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  • 9788021447547
http://localhost/t...ganizacniJednotka
  • 21230
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